JPH0719083Y2 - イオン源 - Google Patents
イオン源Info
- Publication number
- JPH0719083Y2 JPH0719083Y2 JP13706789U JP13706789U JPH0719083Y2 JP H0719083 Y2 JPH0719083 Y2 JP H0719083Y2 JP 13706789 U JP13706789 U JP 13706789U JP 13706789 U JP13706789 U JP 13706789U JP H0719083 Y2 JPH0719083 Y2 JP H0719083Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- ground
- flange
- negative electrode
- potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000000605 extraction Methods 0.000 description 12
- 230000005684 electric field Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13706789U JPH0719083Y2 (ja) | 1989-11-27 | 1989-11-27 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13706789U JPH0719083Y2 (ja) | 1989-11-27 | 1989-11-27 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0376355U JPH0376355U (en]) | 1991-07-31 |
| JPH0719083Y2 true JPH0719083Y2 (ja) | 1995-05-01 |
Family
ID=31684243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13706789U Expired - Lifetime JPH0719083Y2 (ja) | 1989-11-27 | 1989-11-27 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719083Y2 (en]) |
-
1989
- 1989-11-27 JP JP13706789U patent/JPH0719083Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0376355U (en]) | 1991-07-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |